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PDF #1 파일 : Brooks 5850E.pdf (646.8K)
최종수정일 : 2021-05-18 06:40:07
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AnalogueThermal Mass Flow Controller/ Meter [0.003 to 30 SLPM]
- SPECIFICATIONS
Model | 5850E (Controller) | 5860E (Meter) |
Flow Range (lpm) | 0.003 - 30 (N2) | |
Max. Pressure (bar) | 100 | |
Accurcy (%) | 1 (F.S. < 20 slpm) | F.S. (<20 slpm) |
Response Time (sec) | < 3 | |
Temperature Range (℃) | 5-65 | |
Signal In/ Out (V) | 0-5 | |
Fitting | 1/4", 3/8" LOK or VCR | |
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