[SQM] SQM160
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2021.05.18 14:03
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PDF #1 파일 : SQM160.pdf (641.9K)
최종수정일 : 2021-05-18 14:03:32
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Multi Film Rate Thickness Monitor
- SPECIFICATIONS
Sensor Inputs | Standard : Two, Optional : Six |
Measurement Frequency Range | 6.5 to 1.0 MHz (Adjustable) |
Frequency Resolution | Standard : ± 0.30 Hz, High Resolution Option : ± 0.03 Hz |
Thickness Rate Resolution | Standard : ± 0.37 Å, High Resolution Option : ± 0.037 Å |
Stored Films | 99 |
Analog Outputs | Two 0 to 5 V (dc), Rate and Thickness |
Digital Inputs/ Relays | Two Inputs, Four Relay Outputs |
Communicatons Interface | Standard : RS232, Optional : USB or Ethernet |
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